Single Crystal Si Layers on Glass Fabricated by Hydrophilic Fusion Bonding and Smart-Cut Technology
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference13 articles.
1. New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachining
2. Characterization of the electrostatic bonding of silicon and Pyrex glass
3. Initiation toughness of silicon/glass anodic bonds
4. TEM study of the interface of anodic-bonded Si/glass
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electrically Pumped Room-Temperature Pulsed InGaAsP-Si Hybrid Lasers Based on Metal Bonding;Chinese Physics Letters;2009-06
2. P-220L: Late-News Poster: Layer-Transfer of Silicon Single-Crystal Films on Large-Area Glass Substrates For Mobile Display Applications;SID Symposium Digest of Technical Papers;2006
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