Grazing excidence diffraction versus grazing incidence diffraction for strain/stress evaluation in thin films

Abstract

The reflection shift δ2Θ caused by a radial shift δrof the sample away from its tangential position at the focusing circle is examined for grazing incidence diffraction and grazing excidence diffraction. Experimental results for residual strain/stress evaluation on thin films using a Bragg–Brentano diffractometer with a grazing incidence equipment are presented. Grazing excidence diffraction is less sensitive to δrthan grazing incidence diffraction.