A laser plasma source of EUV radiation for projection nanolithography
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Published:2013-01
Issue:1
Volume:77
Page:6-9
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ISSN:1062-8738
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Container-title:Bulletin of the Russian Academy of Sciences: Physics
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language:en
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Short-container-title:Bull. Russ. Acad. Sci. Phys.
Author:
Zuev S. Yu.,Pestov A. E.,Salashchenko N. N.,Toropov M. N.,Chkhalo N. I.,Shcherbakov A. V.
Subject
General Physics and Astronomy
Reference9 articles.
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