A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm-Reference-Cited by-同舟云学术

A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm

Published:2011-01 Issue:1 Volume:75 Page:49-52
ISSN:1062-8738
Container-title:Bulletin of the Russian Academy of Sciences: Physics
language:en
Short-container-title:Bull. Russ. Acad. Sci. Phys.

Author:

Volgunov D. G.,Zabrodin I. G.,Zakalov B. A.,Zuev S. Yu.,Kas’kov I. A.,Kluenkov E. B.,Pestov A. E.,Polkovnikov V. N.,Salashchenko N. N.,Suslov L. A.,Toropov M. N.,Chkhalo N. I.

Publisher

Allerton Press

Subject

General Physics and Astronomy

Link

http://link.springer.com/content/pdf/10.3103/S1062873811010278.pdf

Reference10 articles.

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2. Zabrodin, I.G., Klyuenkov, E.B., Pestov, A.E., et al., Materialy soveshchaniya “Rentgenovskaya optika-2008” (Proc. Meeting “X-ray Optics-2008”), Chernogolovka: IPTM RAN, Oct. 6–9, 2008, p. 44.

3. Barysheva, M.M., Vainer, Yu.A., Gribkov, B.A., et al., Trudy 14-go mezhdunar. simpoziuma “Nanofizika i nanoelektronika” (Proc. 14th Symp. “Nanophysics and Nanoelectronics”), Nizhni Novgorod: IFM RAN, March 15–19, 2010, vol. 1, p. 55.

4. Klyuenkov, E.B., Pestov, A.E., Polkovnikov, V.N., et al., Ross. Nanotekhnol., 2008, vol. 3, nos. 9–10, p. 116.

5. Klyuenkov, E.B., Salashchenko, N.N., and Chkhalo, N.I., Izv. Akad. Nauk. Ser. Fiz., 2009, vol. 73, no. 1, p. 66 [Bull. Russ. Acad. Sci. Phys. (Engl. Transl.), 2009, vol. 73, no. 1, p. 62].

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