Author:
Chkhalo N. I.,Salashchenko N. N.
Subject
Surfaces, Coatings and Films
Reference49 articles.
1. DUV Lithography Systems TwinScan NXT:2000i. http://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt2000i. Cited May 18, 2022.
2. K. Kim, U.-I. Chung, Y. Park, J. Lee, J. Yeo, and D. Kim, Proc. SPIE 8326, 832605 (2012). https://doi.org/10.1117/12.920053
3. G. E. Moore, IEEE Solid-State Circuits Soc. Newslett. 11 (3), 33 (2006). https://doi.org/10.1109/N-SSC.2006.4785860
4. P. J. Silverman, Proc. SPIE 4343 (2001). https://doi.org/10.1117/12.436631
5. D. A. Tichenor, A. K. Ray-Chaudhuri, W. C. Replogle, R. H. Stulen, G. D. Kubiak, P. D. Rockett, L. E. Klebanoff, K. J. Jefferson, A. H. Leung, J. B. Wronosky, L. C. Hale, H. N. Chapman, J. S. Taylor, J. A. Folta, C. Montcalm, R. Soufli, E. A. Spiller, K. L. Blaedel, G. E. Sommargren, D. W. Sweeney, P. P. Naulleau, K. A. Goldberg, E. M. Gullikson, J. Bokor, P. J. Batson, D. T. Jr. Attwood, K. H. Jackson, S. D. Hector, C. W. Gwyn, and P.-Y. Yan, Proc. SPIE 4343 (2001). https://doi.org/10.1117/12.436665