Author:
Zuev S. Yu.,Pestov A. E.,Polkovnikov V. N.,Salashchenko N. N.,Skryl’ A. S.,Strulya I. L.,Toropov M. N.,Chkhalo N. I.
Subject
Surfaces, Coatings and Films
Reference5 articles.
1. D. G. Volgunov, I. G. Zabrodin, B. A. Zakalov, S. Yu. Zuev, I. A. Kas’kov, E. V. Kluenkov, M. N. Toropov, and N. I. Chkhalo, A Stand for a Projection EUV Nanolithographer-Multiplicator with a Design Resolution of 30 nm. Bulletin of the Russian Academy of Sciences: Physics. 75(1), 49 (2011).
2. S. Yu. Zuev, A. E. Pestov, N. N. Salashchenko, A. S. Skryl, I. L. Stroulea, L. A. Suslov, M. N. Toropov, and N. I. Chkhalo, Two-Mirror Projection Objective of a Nanolithographer at λ = 13.5 nm. Bulletin of the Russian Academy of Sciences: Physics. 75(1), p. 57.
3. E. B. Klyuenkov, N. N. Salashchenko, and N. I. Chkhalo, Poverkhnost’, No. 2, 41 (2003).
4. A. E. Pestov, N. N. Salashchenko, and N. I. Chkhalo, Simulation of the Intensity of X-Ray Nube Radiation in Soft X-Ray and Extreme UV Regions. Bulletin of the Russian Academy of Sciences: Physics. 72(2), p. 201 (2008).
5. S. S. Andreev, A. D. Akhsakhalyan, M. S. Bibishkin, et al., Central Eur. J. Phys. 1, 191 (2003).
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献