Inverse problem of Mueller polarimetry for metrological applications

Abstract

Abstract Inverse problem of Mueller polarimetry is defined as a determination of geometrical features of the metrological structures (i.e. 1D diffraction gratings) from its experimental Mueller polarimetric signature. This nonlinear problem was considered as an optimization problem in a multi-parametric space using the least square criterion and the Levenberg–Marquardt algorithm. We demonstrated that solving optimization problem with the experimental Mueller matrix spectra taken in conical diffraction configuration helps finding a global minimum and results in smaller variance values of reconstructed dimensions of the grating profile.