Fabrication of Pb(Zr,Ti)O3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(DPM)2, Zr(MMP)4 and Ti(MMP)4-Reference-Cited by-同舟云学术

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Fabrication of Pb(Zr,Ti)O3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(DPM)2, Zr(MMP)4 and Ti(MMP)4

Published:2004-01 Issue:1 Volume:68 Page:105-121
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

OTANI YOHEI¹,NAKAMURA KIMITOSHI¹,OKAMURA SOICHIRO¹,SHIOSAKI TADASHI¹

Affiliation:

1. a Graduate School of Materials Science, Nara Institute of Science and Technology (NAIST) , 8916-5 Takayama-cho, Ikoma, Nara, Japan , 630-0192

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580490895743

Reference17 articles.

1. Preparation of Pb(Zr,Ti)O3thin films on electrodes including IrO2

2. Reaction Mechanism and Electrical Properties of(Ba,Sr)TiO3Films Prepared by Liquid Source Chemical Vapor Deposition

3. Characteristics of ferroelectric SrBi2Ta2O9 thin films grown by “flash” MOCVD

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of Ferroelectric Pb(Zr,Ti)O3Thin Films by Spray Metalorganic Chemical Vapor Deposition;Japanese Journal of Applied Physics;2007-07-13

2. LOW TEMPERATURE DEPOSITION OF Pb(Zr,Ti)O3 THIN FILMS BY LIQUID DELIVERY MOCVD USING A COCKTAIL SOURCE WITH Pb(DMAMP)2, Zr(MMP)4 AND Ti(MMP)4;Integrated Ferroelectrics;2006-08-17

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