Deposition and thermal processing of ferroelectric thin films with the primaxx 2f platform
Author:
Affiliation:
1. a Primaxx Inc. , 5055 Mark Dabling Blvd., Colorado Springs, CO 80918, USA
2. b Primaxx Inc. , 7377 William Ave. #800, Allentown, , PA 18106, USA
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584580108015552
Reference4 articles.
1. Conformal LSMCD deposition of SrBi2(Ta1-xNbx)2O9
2. Second generation liquid source misted chemical deposition (LSMCD) technology for ferroelectric thin films
3. Chemical solution deposition (CSD) and characterization of ferroelectric and dielectric thin films
4. Sub-100 nm SBT films for low voltage and high density feram applications
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Aerosol Deposition;Chemical Solution Deposition of Functional Oxide Thin Films;2013
2. Studies of solution processed metal oxides on silicon;Microelectronic Engineering;2007-09
3. Effects of scaling the film thickness on the ferroelectric properties of SrBi2Ta2O9 ultra thin films;Applied Physics Letters;2003-06-02
4. Mist Deposition of Micron-Thick Lead Zirconate Titanate Films;MRS Proceedings;2003
5. Reduced Thermal Budget Process for SBT Thin Film in Planer Type Stack Cell FeRAMs;Integrated Ferroelectrics;2002-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3