Beam scanning-electrostatic-Reference-Cited by-同舟云学术

Beam scanning-electrostatic

Published:1979-01 Issue:1-4 Volume:44 Page:71-80
ISSN:0033-7579
Container-title:Radiation Effects
language:en
Short-container-title:Radiation Effects

Author:

Keller J. H.

Publisher

Informa UK Limited

Subject

General Engineering

Link

http://www.tandfonline.com/doi/pdf/10.1080/00337577908245981

Reference16 articles.

1. High current electrostatic deflector and scanner

2. Pierce, J. R. 1954.Theory and Design of Electron Beams, 43Princeton, N. J.: Van Nostrand.

3. Electron Beam Deflection: Part II. Applications of the Small‐Angle Deflection Theory

4. Septier, A. 1967.Focusing of Charged Particles, Vol. 2, 163New York: Academic Press.

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The EXTRION 220 parallel scan magnet;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04

2. Process control issues for ion implantation using large tilt angles;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04

3. Beam scanning system for large tilt angle ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02

4. Tilt gradient dose error in an electrostatically scanned ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-06

5. Implant uniformity improvement using advanced scanning techniques;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01