Author:
Keller J.H.,Coultas D.K.,Hicks W.W.,Winnard J.R.
Cited by
9 articles.
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1. Uniform large area beam scanning with a freeman source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-01
2. Comparison of Beam Scanning Systems;Ion Implantation: Equipment and Techniques;1983
3. Ion Implantation System Concepts;Ion Implantation Techniques;1982
4. Beam optics design for ion implantation;Nuclear Instruments and Methods in Physics Research;1981-10
5. Target chambers for ion implantation using mechanical scanning;Nuclear Instruments and Methods in Physics Research;1981-10