Author:
Kanter Michael,Wittkower Andrew
Subject
Instrumentation,Nuclear and High Energy Physics
Reference3 articles.
1. Proc. Int. Ion Engineering Congress — ISIAT '83 and IPAT '83;Tabata,1983
2. Eaton Corporation, Ion Beam Systems Division, Beverly, Massachusetts (unpublished).
3. High current electrostatic deflector and scanner
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Freeman ion source: An overview (invited);Review of Scientific Instruments;1992-04
2. Enhanced ionization freeman ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
3. An improved ion source for ion implantation;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-07
4. Ion beam system for implanting industrial products of various shapes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1985-01