Ion beam system for implanting industrial products of various shapes-Reference-Cited by-同舟云学术

Ion beam system for implanting industrial products of various shapes

Published:1985-01 Issue:1-2 Volume:6 Page:88-93
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Denholm A.S.,Wittkower A.B.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. Surface modification and alloying by laser, ion and electron beams;Hirvonen,1983

3. these Proceedings (Ion Implantation Equip. & Tech. '84);Wittkower,1985

4. Ion Implantation equipment and techniques;Grabowski,1983

5. Eaton Corporation, Ion Beam Systems Division, Beverly, Ma.

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