Author:
Simonton Robert B.,Kamenitsa Dennis E.,Ray Andy M.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Unravelling impacts of C ion implantations at polar angles in the physical properties of ZnO nanostructured thin films;Materials Letters;2022-02
2. Transmission Electron Microscopy and Spectroscopic Ellipsometry Studies of Damage Layer Induced by Large Tilt Angle Ion Implantation;Journal of The Electrochemical Society;1996-08-01
3. Ion beam techniques in microelectronics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-05
4. Beam incidence variations in spinning disk ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
5. A versatile ion implanter for planar and 3D device construction;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04