Transmission Electron Microscopy and Spectroscopic Ellipsometry Studies of Damage Layer Induced by Large Tilt Angle Ion Implantation-Reference-Cited by-同舟云学术

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Transmission Electron Microscopy and Spectroscopic Ellipsometry Studies of Damage Layer Induced by Large Tilt Angle Ion Implantation

Published:1996-08-01 Issue:8 Volume:143 Page:2636-2640
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

He Zhiping¹,Cristiano Filadelfo²,Zhou Zuyao¹,Qian Youhua³,Chen Liangyao³,Lin Chenglu¹,Hemment P. L. F.²,Zou Shichang¹

Affiliation:

1. Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, China

2. Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey GU2 5XH, England

3. Department of Physics, Fudan University, Shanghai 200433, China

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.1837061/pdf

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Unravelling impacts of C ion implantations at polar angles in the physical properties of ZnO nanostructured thin films;Materials Letters;2022-02

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