Author:
Sasaki M.,Tanaka M.,Kawakami H.,Kumazaki H.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Development of Combinatorial Ion Implantation System;Japanese Journal of Applied Physics;2003-09-15
2. Sweep Uniformity Control System in the NISSIN NH-20SP;Ion Implantation Technology–92;1993
3. Implant dose uniformity simulation program;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04