Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers
Author:
Affiliation:
1. Department of Industrial Engineering, Hanyang University, Seoul, Korea
2. School of Information and Computer Engineering, Hongik University, Seoul, Korea
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management
Link
https://www.tandfonline.com/doi/pdf/10.1080/00207543.2011.574502
Reference37 articles.
1. Yield prediction via spatial modeling of clustered defect counts across a wafer map
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