Affiliation:
1. Guangxi Key Laboratory of Automatic Detecting Technology and Instruments, School of Electronic Engineering & Automation, Guilin University of Electronic Technology, Guilin, Guangxi, China
Funder
National Natural Science Foundation of China
Guangxi Natural Science Foundation
Guangxi Key Laboratory of Automation Test and Instrumentation
Innovation Project of GUET Graduate Education
Guangxi Key Laboratory of Intelligent Transportation System
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Reference35 articles.
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2. Wafer Map Defect Detection and Recognition Using Joint Local and Nonlocal Linear Discriminant Analysis
3. Recognition of wafer defects based on hybrid models and manifold regulation;Lu;Comput. Integr. Manuf. Syst.,2018
4. Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale Data Sets
5. Manufacturing technique and industry status of semiconductor silicon wafers;Yan;Diam. Abras. Eng.,2020