Influence of hydrogen on the structure and properties of tetrahedral amorphous carbon films obtained by the filtered cathodic vacuum arc technique-Reference-Cited by-同舟云学术

Influence of hydrogen on the structure and properties of tetrahedral amorphous carbon films obtained by the filtered cathodic vacuum arc technique

Published:1999-10 Issue:10 Volume:79 Page:1647-1658
ISSN:1364-2812
Container-title:Philosophical Magazine B
language:en
Short-container-title:Philosophical Magazine B

Author:

Cheah L. K.¹,Shi X.¹,Liu E.¹,Tay B. K.¹,Shi J. R.¹,Sun Z.¹

Affiliation:

1. a Ion Beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University , Singapore , 639798 , Singapore

Publisher

Informa UK Limited

Subject

General Physics and Astronomy,General Chemical Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1080/13642819908218328

Reference25 articles.

1. Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition

2. Deposition of nitrogen doped tetrahedral amorphous carbon (ta-C:N) films by ion beam assisted filtered cathodic vacuum arc

3. Chapter 2 The Optical Absorption Edge of a-Si: H

4. Properties of tetrahedral amorphous carbon films deposited in a filtered cathodic arc in the presence of hydrogen

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