Impact of cation compositions on the performance of thin-film transistors with amorphous indium gallium zinc oxide grown through atomic layer deposition
Author:
Affiliation:
1. Department of Electronics and Computer Engineering, Hanyang University, Seoul, Republic of Korea
2. R&D Center, LG Display Company, Paju-Si, Kyonggi-Do, Republic of Korea
Funder
LG Display
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/15980316.2018.1540365
Reference14 articles.
1. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
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4. High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering
5. Improvement in both mobility and bias stability of ZnSnO transistors by inserting ultra-thin InSnO layer at the gate insulator/channel interface
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