Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films-Reference-Cited by-同舟云学术

Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films

Published:2024-07-27 Issue: Volume: Page:
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Morales Carlos¹^ORCID,Plate Paul²,Marth Ludwig²,Naumann Franziska²,Kot Małgorzata¹,Janowitz Christoph¹,Kus Peter³,Zoellner Marvin Hartwig⁴^ORCID,Wenger Christian⁴^ORCID,Henkel Karsten¹^ORCID,Flege Jan Ingo¹^ORCID

Affiliation:

1. Applied Physics and Semiconductor Spectroscopy, Brandenburg University of Technology Cottbus−Senftenberg, K.-Zuse-Str. 1, Cottbus 03046, Germany

2. SENTECH Instruments GmbH, Schwarzschildstraße 2, Berlin 12489, Germany

3. Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University, V Holešovičkách 2, Prague 8 18000, Czech Republic

4. IHP─Leibniz-Institut für innovative Mikroelektronik, Im Technologiepark 25, Frankfurt (Oder) 15236, Germany

Funder

Brandenburgische Technische Universit?t Cottbus-Senftenberg

Brandenburger Staatsministerium f?r Wissenschaft, Forschung und Kultur

Bundesministerium f?r Wirtschaft und Energie

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.4c00730

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