Highly photosensitive magnetron-sputtered amorphous SiC:H doped with Al
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics
Link
http://www.tandfonline.com/doi/pdf/10.1080/09500838908214775
Reference9 articles.
1. Doping effects of group III and group V elements in unhydrogenated neon-sputtered amorphous silicon
2. Sputtered hydrogenated amorphous Si alloyed with Al
3. The influence of aluminium upon electronic transport in r.f. sputtered amorphous Si : H
4. High ConductiveP-Type Films of Si100-xAlx:H Fabricated by Co-Sputtering and Subsequent Annealing
5. Highly photoconductive and photosensitive hydrogenated amorphous silicon carbon alloy films prepared by magnetron sputtering
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electrical, optical and structural properties of a-SiNGe:H films prepared by the r.f. glow-discharged decomposition;Thin Solid Films;1996-08
2. The effect of hydrogen dilution on the interatomic bonding of amorphous hydrogenated silicon: carbon;Journal of Non-Crystalline Solids;1994-03
3. Enhancement of photoconductivity in r.f. glow-discharge-deposited a-SiC: H films doped with nitrogen;Philosophical Magazine B;1993-07
4. The Structure of Amorphous Hydrogenated Silicon:Carbon Alloys Using X-Ray and Neutron Scattering and Computer Simulation - The Effect of Hydrogen Dilution;MRS Proceedings;1992
5. Doping effects of aluminium on the properties of hydrogenated amorphous silicon–carbon alloy films prepared by magnetron sputtering;Philosophical Magazine B;1990-11
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