PECVD process parameter optimization: towards increased hardness of diamond-like carbon thin films-Reference-Cited by-同舟云学术

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PECVD process parameter optimization: towards increased hardness of diamond-like carbon thin films

Published:2018-09-05 Issue:16 Volume:33 Page:1905-1913
ISSN:1042-6914
Container-title:Materials and Manufacturing Processes
language:en
Short-container-title:Materials and Manufacturing Processes

Author:

Ghadai Ranjan Kumar¹²,Kalita Kanak³^ORCID,Mondal Subhas Chandra¹,Swain Bibhu Prasad⁴

Affiliation:

1. Mechanical Engineering, Indian Institute of Engineering Science and Technology, Shibpur, Howrah, India

2. Mechanical Engineering, Sikkim Manipal Institute of Technology, Sikkim Manipal University, Sikkim, India

3. Aerospace Engineering & Applied Mechanics, Indian Institute of Engineering Science and Technology, Shibpur, Howrah, India

4. Centre for Materials Science and Nanotechnology, Sikkim Manipal Institute of Technology, Sikkim Manipal University, Sikkim, India

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.tandfonline.com/doi/pdf/10.1080/10426914.2018.1512114

Reference27 articles.

1. Effect of surface structure and wettability of DLC and N-DLC thin films on adsorption of glycine

2. Reactive biased target ion beam deposited W–DLC nanocomposite thin films — Microstructure and its mechanical properties

3. Structure and mechanical properties of W incorporated diamond-like carbon films prepared by a hybrid ion beam deposition technique

4. The microstructure, mechanical and friction properties of protective diamond like carbon films on magnesium alloy

5. Optimization of pulsed DC PACVD parameters: Toward reducing wear rate of the DLC films

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