Analysis of passivating oxide and surface contaminants on GaAs (100) by temperature-dependent and angle resolved x-ray photoelectron spectroscopy, and time-of-flight secondary ion mass spectrometry
-
Published:1992-07
Issue:4
Volume:10
Page:1291
-
ISSN:0734-211X
-
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
-
language:
-
Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
12 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献