Stress stabilization of β‐tantalum and its crystal structure-Reference-Cited by-同舟云学术

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Stress stabilization of β‐tantalum and its crystal structure

Published:1993-11 Issue:6 Volume:11 Page:3067-3071
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kondo Kazuaki,Nakabayashi Masaaki,Kawakami Ken’ichi,Chijimatsu Tatsuo,Nakaishi Masafumi,Yamada Masao,Yamabe Masaki,Sugishima Kenji

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578298

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Interrelationships among macrostress, microstructure and mechanical behavior of sputtered hard Ti(Al,V)N films;Materials Letters;2019-01

2. Growth and characterization of Ta/Ti bi-layer films on glass and Si (111) substrates by direct current magnetron sputtering;Applied Surface Science;2012-07

3. Coefficient of thermal expansion and biaxial elastic modulus of β phase tantalum thin films;Applied Physics Letters;2007-04-30

4. Effect of oxygen on the thermomechanical behavior of tantalum thin films during the β–α phase transformation;Journal of Applied Physics;2006-12-15

5. Thermomechanical behavior and microstructural evolution in tantalum thin films;MRS Proceedings;2004

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