Effect of oxygen on the thermomechanical behavior of tantalum thin films during the β–α phase transformation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2388742
Reference55 articles.
1. Phase composition and conductivity of sputtered tantalum
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4. Texture and phase transformation of sputter-deposited metastable Ta films and multilayers
5. Ion energy, ion flux, and ion species effects on crystallographic and electrical properties of sputter-deposited Ta thin films
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