Coefficient of thermal expansion and biaxial elastic modulus of β phase tantalum thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2734468
Reference25 articles.
1. Factors controlling the structure of sputtered Ta films
2. Phase formation and microstructure changes in tantalum thin films induced by bias sputtering
3. Ion energy, ion flux, and ion species effects on crystallographic and electrical properties of sputter-deposited Ta thin films
4. Preparation and properties of tantalum thin films
5. Temperature coefficient of resistance of beta-tantalum films and mixtures with b.c.c.-tantalum
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