Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling-Reference-Cited by-同舟云学术

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Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling

Published:2019-05 Issue:3 Volume:37 Page:031301
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Mathioudaki Stella¹,Vandenabeele Cédric¹,Tonneau Romain¹,Pflug Andreas²,Lucas Stéphane¹

Affiliation:

1. Laboratory of Analysis by Nuclear Reaction, Namur Institute of Structured Matter, University of Namur, Rue de Bruxelles 61, B-5000 Namur, Belgium

2. Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder Weg 54e, 38108 Braunschweig, Germany

Funder

Fonds De La Recherche Scientifique - FNRS

Service Public de Wallonie

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5064690

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model;Surface and Coatings Technology;2022-11

2. Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply;Vacuum;2022-11

3. Importance of higher‐level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathways;Plasma Processes and Polymers;2022-03-24

4. Magnetron sputtering: determining scaling relations towards real power discharges using 3D particle-in-cell Monte Carlo models;Plasma Sources Science and Technology;2020-11-01

5. Experimental and theoretical study of a magnetron DC-PECVD acetylene discharge: Determination of the main species and reactions taking place in the plasma;Surface and Coatings Technology;2020-10

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