Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model-Reference-Cited by-同舟云学术

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Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model

Published:2022-11 Issue: Volume:449 Page:128954
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Roštek Andrej,Zikán Petr,Schiffler Mario,Joost Hannes,Jílek Mojmír,Frank Heiko,Obrusník Adam

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference22 articles.

1. Increase of coating thickness on sharp edges, deposited by cathodic arc evaporation;Čekada;Surf. Coat. Technol.,2021

2. Plasma–surface interaction at sharp edges and corners during ion-assisted physical vapor deposition. Part I: edge-related effects and their influence on coating morphology and composition;Macak;J. Appl. Phys.,2003

3. Bias voltage and incidence angle effects on the structure and properties of vacuum arc deposited TiN coatings;Zhitomirsky;Surf. Coat. Technol.,2000

4. Three-dimensional thickness and property distribution of TiC films deposited by DC magnetron sputtering and HIPIMS;Balzer;Surf. Coat. Technol.,2014

5. Deposited by magnetron sputtering: a joint modelling and experimental study;Tonneau;J. Phys. D. Appl. Phys.,2018

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