Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply-Reference-Cited by-同舟云学术

Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply

Published:2022-11 Issue: Volume:205 Page:111413
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Mishra Himanshu,Tichý Milan,Kudrna Pavel^ORCID

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

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