Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth-Reference-Cited by-同舟云学术

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Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

Published:2004 Issue:1 Volume:22 Page:297
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Pawlak B. J.,Lindsay R.,Surdeanu R.,Dieu B.,Geenen L.,Hoflijk I.,Richard O.,Duffy R.,Clarysse T.,Brijs B.,Vandervorst W.,Dachs C. J. J.

Publisher

American Vacuum Society

Subject

General Engineering

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