Very high frequency capacitively coupled discharges for large area processing
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.580201
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5. Series resonance effects of a variable inductor termination on the nonpowered electrode in capacitively coupled plasmas;Journal of Vacuum Science & Technology A;2023-07-31
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