Author:
Ryding G.,Wittkower A. B.,Rose P. H.
Cited by
8 articles.
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1. High-Dose Implantation;Ion Implantation and Beam Processing;1984
2. Ion Implantation System Concepts;Ion Implantation Techniques;1982
3. A new dose control technique for ion implantation;Nuclear Instruments and Methods in Physics Research;1981-10
4. Some considerations on target chamber design;Nuclear Instruments and Methods in Physics Research;1981-10
5. Target chambers for ion implantation using mechanical scanning;Nuclear Instruments and Methods in Physics Research;1981-10