Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.3580934
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1. Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field;Physics of Plasmas;2024-08-01
2. Advancement of Langmuir probe-based laser photo-detachment technique for negative ion density measurement in a high-power helicon plasma source;Review of Scientific Instruments;2024-04-01
3. The measurement and impact of negative oxygen ions during reactive sputter deposition;Critical Reviews in Solid State and Materials Sciences;2023-09-21
4. Equilibrium properties of inhomogeneous partially-magnetized plasma containing negative ions;Journal of Physics D: Applied Physics;2022-03-09
5. Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe;Vacuum;2021-12
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