Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.3580934
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3. Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe;Vacuum;2021-12
4. Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas;Plasma Sources Science and Technology;2021-03-01
5. Effect of argon and oxygen gas concentration on mode transition and negative ion production in helicon discharge;Journal of Applied Physics;2020-11-14
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