Uniform sputter deposition of high-quality epitaxial complex oxide thin films-Reference-Cited by-同舟云学术

Uniform sputter deposition of high-quality epitaxial complex oxide thin films

Published:2017-11 Issue:6 Volume:35 Page:060607
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Brewer A.,Cho K. H.,Saenrang W.¹,Baek S. H.,Frederick J. C.,Eom C. B.

Affiliation:

1. Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706 and Department of Physics, University of Wisconsin-Madison, Madison, Wisconsin 53706

Funder

National Science Foundation (NSF)

Army Research Office (ARO)

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.4998956

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