Electron beams in individual column cells of multicolumn cell system-Reference-Cited by-同舟云学术

Electron beams in individual column cells of multicolumn cell system

Published:2008-11 Issue:6 Volume:26 Page:2025-2031
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Yamada Akio¹,Yasuda Hiroshi¹,Yamabe Masaki¹

Affiliation:

1. Mask Writing Equipment Technology Research Laboratory, Mask Design, Drawing, and Inspection Technology Research Department (Mask D2I), Association of Super-Advanced Electronics Technologies (ASET), 1-5, Shin-tone, Otone-machi, Kitasaitama-gun, Saitama 349-1158, Japan

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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