Author:
Hanfmann A. M.,Kumagai H. Y.,Fletcher I. M.
Cited by
4 articles.
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1. Physical Sputtering and Sputter Deposition;The Foundations of Vacuum Coating Technology;2018
2. Evolution of integrated-circuit vacuum processes: 1959–1975;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2000-07
3. The use of ac power on cylindrical magnetrons;Journal of Non-Crystalline Solids;1997-09
4. Selected area and in-depth auger analysis of thin films;Thin Solid Films;1973-12