Simulations of BCl3/Cl2/Ar plasmas with comparisons to diagnostic data-Reference-Cited by-同舟云学术

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Simulations of BCl3/Cl2/Ar plasmas with comparisons to diagnostic data

Published:1998-07 Issue:4 Volume:16 Page:2227-2239
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Meeks Ellen,Ho Pauline,Ting Aili,Buss Richard J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581332

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