Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer-Reference-Cited by-同舟云学术

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Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

Published:2009 Issue:6 Volume:27 Page:2635
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Nam Sung-Wook,Rooks Michael J.,Yang Joel K. W.,Berggren Karl K.,Kim Hyun-Mi,Lee Min-Hyun,Kim Ki-Bum,Sim Jae Hwan,Yoon Do Yeung

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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5. Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability;Journal of Vacuum Science & Technology B;2021-01

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