Synthesis of diamond using a low pressure, radio frequency, inductively coupled plasma
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.581516
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Growth of boron-doped diamond-like carbon films from a low-pressure high-density plasma in inductively coupled chemical vapour deposition;Thin Solid Films;2024-05
2. Growth of diamond-like carbon films with significant nanocrystalline phases in a low-pressure high-density CH4 plasma in ICP-CVD: Effect of negative dc substrate bias;Applied Surface Science;2022-09
3. Diamond: Synthesis, Characterisation and Applications;Advanced Structured Materials;2010
4. Deposition of hard carbon coatings using combined inductively and capacitively coupled plasma sources;Surface and Coatings Technology;2005-01
5. Effects of direct-current bias on the carbonization of Si(100) at low temperatures using electron cyclotron resonance chemical vapor deposition;Thin Solid Films;2003-07
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