Growth of boron-doped diamond-like carbon films from a low-pressure high-density plasma in inductively coupled chemical vapour deposition

Author:

Saha Sucharita,Das DebajyotiORCID

Funder

Department of Science and Technology, Ministry of Science and Technology, India

Council of Scientific and Industrial Research, India

Publisher

Elsevier BV

Reference81 articles.

1. Nanocrystalline diamond: a high-impact carbon nanomaterial for multifunctional applications including as nanofiller in biopolymeric matrices, Chap. 5 in;Das,2019

2. Properties and classification of diamond-like carbon films;Ohtake;Mater. (Basel),2021

3. The properties and applications of nanodiamonds;Mochalin;Nat. Nanotechnol.,2012

4. Characterization of boron-doped diamond-like carbon prepared by radio frequency sputtering;Pu;Thin Solid Film,2010

5. Anti-reflection coatings for silicon solar cells from hydrogenated diamond like carbon;Das;Appl. Surf. Sci.,2015

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