A Novel Strategy for the Synthesis of CeO2/CeF3 Composite Powders with Improved Suspension Stability and Chemical Mechanical Polishing (CMP) Performance-Reference-Cited by-同舟云学术

A Novel Strategy for the Synthesis of CeO2/CeF3 Composite Powders with Improved Suspension Stability and Chemical Mechanical Polishing (CMP) Performance

Published:2015-09-23 Issue:10 Volume:40 Page:2897-2901
ISSN:1319-8025
Container-title:Arabian Journal for Science and Engineering
language:en
Short-container-title:Arab J Sci Eng

Author:

Zhang Zongtao,Yu Gongdong,Zhou Ying,Dong Lin,Sun Qiuxia,Jia Xiaolin,Shao Guosheng

Funder

the China Postdoctoral Science Foundation

the Opening Project of State Key Laboratory of High Performance Ceramics and Superfine Microstructure

the Key Science and Technology Research Projects of Henan Provincial Education Department

the Excellent Young Teacher Development Foundation of Zhengzhou University

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

http://link.springer.com/content/pdf/10.1007/s13369-015-1847-y.pdf

Reference9 articles.

1. Kim S.H., Saka N.J.: Pad scratching in chemical–mechanical polishing: the effects of mechanical and tribological properties. ECS J. Solid State Sci. 3, 169 (2014)

2. Tian L., Zhang Z.T., Zhang J., Sun Q.X., Jia X.L.: Preparation of composite spherical alumina nanoparticles and study on their CMP performance. Key Eng. Mater. 562, 869 (2013)

3. Oh M.H., Nho J.S., Cho S.B., Lee J.S., Singh R.K.: Polishing behaviors of ceria abrasives on silicon dioxide and silicon nitride CMP. Powder Technol. 206, 239 (2011)

4. Kim D.H., Kang H.G., Kim S.K., Paik U.Y., Park J.G.: Reduction of large particles in ceria slurry by aging and selective sedimentation and its effect on shallow trench isolation chemical mechanical planarization. Jpn. J. Appl. Phys. 45, 6790 (2006)

5. Song X.L., Jiang N., Li K., Xu D.Y., Qiu G.Z.: Synthesis of CeO2-coated SiO2 nanoparticle and dispersion stability of its suspension. Mater. Chem. Phys 110, 128 (2008)

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on the development of CeO2 self-sharpening gel abrasive tools and grinding performance on quartz glass;Journal of Mechanical Science and Technology;2024-09

2. Influence of Al³⁺ Doping on Dispersion and Suspension Stability of Nano CeO₂ Particles;Integrated Ferroelectrics;2022-12-29

3. Fabrication and Application of Gel-Forming CeO2 Fixed Abrasive Tools for Quartz Glass Polishing;International Journal of Precision Engineering and Manufacturing;2022-07-04

4. Preparation and chemical mechanical polishing performance of CeO 2 /CeF 3 composite powders;Micro & Nano Letters;2018-01

5. Nanosized CeO2 Particles Obtained by Mechanical Solid-State Reaction Combined with Sol–Gel Method;Transactions of the Indian Institute of Metals;2017-04-25