A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Link
http://link.springer.com/content/pdf/10.1007/BF02411051.pdf
Reference14 articles.
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3. Sharpe, W.N., Turner, K.T., andEdwards, R.L., “Tensile Testing of Polysilicon,”J. Exp. Mech.,39, (3),162–170 (1999).
4. Greek, S., Ericson, F., Johansson, S., andSchweitz, J., “In Situ Tensile Strength Measurement and Weibull Analysis of Thick Film and Thin Film Micromachined Polysilicon Structures,”Thin Solid Films,292,247–254 (1997).
5. Koskinen, J., Steinwall, J.E., Soave, R., andJohnson, H.H., “Microtensile Testing of Free-Standing Polysilicon Fibers of Various Grain Sizes,”J. Micromech. Microeng.,3,13–17 (1993).
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