1. Sharpe, W.N., Jr., Yuan, B., and Edwards, R.L., “Variations in Mechanical Properties of Polysilicon,” Proceedings of the 43rd International Symposium of the Instrumentation Society of America, Orlando, FL, 179–188 (1997).
2. Koskinen, J., Steinwall, E., Soave, R. andJohnson, H.H., “Microtensile Testing of Free-standing Polysilicon Fibers of Various Grain Sizes”.J. Micromech. Microeng.,35,13–17 (1993).
3. Biebl, M. and Philipsborn, H.V., “Fracture Strength of Doped and Undoped Polysilicon,” Transducers '95-Eurosensors IX, Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, 72–75 (1995).
4. Read, D.T. andMarshall, J.C., “Measurements of Fracture Strength and Young's Modulus of Surface-micromachined Polysilicon,”Microlithography and Metrology in Micromachining II,SPIE 2880,56–63 (1966).
5. Tsuchiya, T., Tabata, T., Sakata, S., and Tagi, Y., “Specimen Size Effect on Tensile Strength of Surface Micromachined Polycrystalline Silicon Thin Films,” Proceedings of the Tenth IEEE International Workshop on Microelectromechanical Systems, Nagoya Japan, 529–534 (1997).