Electrostatic repulsion-based graphene multi-cavity array resonators for molecular-level detection-Reference-Cited by-同舟云学术

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Electrostatic repulsion-based graphene multi-cavity array resonators for molecular-level detection

Published:2024-03 Issue:7 Volume:35 Page:
ISSN:0957-4522
Container-title:Journal of Materials Science: Materials in Electronics
language:en
Short-container-title:J Mater Sci: Mater Electron

Author:

Zhang Shuai,Mei Linyu^ORCID,Bi Kaixi,Guo Miaoli,Li Qiannan,Han Shuqi

Funder

National Natural Science Foundation of China

Shanxi Provincial Key Research and Development Project

General project of Natural Science Foundation of Shanxi Province

North University of China 18th Graduate Student Technology Program

Publisher

Springer Science and Business Media LLC

Link

https://link.springer.com/content/pdf/10.1007/s10854-024-12274-4.pdf

Reference37 articles.

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2. M. Aikele, K. Bauer, W. Ficker, F. Neubauer, U. Prechtel, J. Schalk, H. Seidel, Resonant accelerometer with self-test. Sens. Actuators A: Phys. 92, 161–167 (2001). https://doi.org/10.1016/S0924-4247(01)00558-1

3. C. Burrer, J. Esteve, A novel resonant silicon accelerometer in bulk-micromachining technology. Sens. Actuators A: Phys. 46, 185–189 (1995). https://doi.org/10.1016/0924-4247(94)00887-N

4. Y. Xu, J.-T. Lin, B.W. Alphenaar, R.S. Keynton, Viscous damping of microresonators for gas composition analysis. Appl. Phys. Lett. (2006). https://doi.org/10.1063/1.2193347

5. F. Lochon, L. Fadel, I. Dufour, D. Rebière, J. Pistré, Silicon made resonant microcantilever: dependence of the chemical sensing performances on the sensitive coating thickness. Mater. Sci. Eng.: C 26, 348–353 (2006). https://doi.org/10.1016/j.msec.2005.10.079

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