Author:
Aikele M.,Bauer K.,Ficker W.,Neubauer F.,Prechtel U.,Schalk J.,Seidel H.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. D.E. Ricken, W. Gessner (Eds.), in: Proceedings of the Advanced Microsystems for Automotive Applications (AMAA), Springer, Berlin, March 1999.
2. T.A. Roessig, R.T. Howe, A.P. Pisano, J.H. Smith, Surface-Micromachined Resonant Accelerometer, in: Proceedings of the International Conference of Solid State Sensors and Actuators, Transducers 1997, Chicago, USA, pp. 859–862.
3. T. Kvisteröy, H. Jakobsen, 1998, Force Sensor Device, US Patent 5,834,646.
4. A thermally-excited silicon accelerometer;Satchell;Sens. Actuators,1989
5. Performance of thermally excited resonators;Lammerink;Sens. Actuators A,1990
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