Author:
Bruschi P.,Ciofi C.,Dattilo V.,Diligenti A.,Nannini A.,Neri B.
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. P.L. Pai and C.H. Thing, IEEE Electron Device Lett. 10, 423 (1989).
2. S.P. Murarka, R.J. Gutmann, A.E. Kaloyeros and W.A. Lanford, Thin Solid Films 236, 257 (1993).
3. T. Nitta, T. Ohmi, T. Hoshi, S. Sakai, K. Sakaibara, S. Imai and T. Shibata, J. Electrochem. Soc. 140, 1131 (1993).
4. J. Tao, N.W. Cheung and C. Hu, IEEE Electron Device Lett. 14, 249 (1993).
5. S.P. Murarka, Tungsten and Other Advanced Metals for ULSI Applications in 1990, ed. G.C. Smith and R. Blumenthal, (Pittsburgh, PA: MRS, 1990), p. 179.
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