Author:
Ping A. T.,Schmitz A. C.,Asif Khan M.,Adesida I.
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
31 articles.
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5. Plasma-induced damage study for n-GaN using inductively coupled plasma reactive ion etching;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001