Author:
Wu Ke,Zhou Libo,Shimizu Jun,Onuki Teppei,Yamamoto Takeyuki,Ojima Hirotaka,Yuan Julong
Funder
Japan Society for the Promotion of Science
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Reference24 articles.
1. Li ZC, Pei ZJ, Funkenbusch, PD (2011) Machining processes for sapphire wafers: a literature review. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 225(7):975–989
2. Lin YS, Lin KH, Chang YM, Yeh JA (2012) Epitaxy of m-plane GaN on nanoscale patterned c-plane sapphire substrates. Surf Sci 606(1–2):L1–L4
3. Wang G, Zuo H, Zhang H, Wu Q et al (2010) Preparation, quality characterization, service performance evaluation and its modification of sapphire crystal for optical window and dome application. Mater Design 31(2):706–711
4. Gutsche HW, Moody JW (1978) Polishing of sapphire with colloidal silica. J Electrochem Soc 125(1):136–138
5. Eda H, Zhou L, Nakano H, Kondo R et al (2001) Development of single step grinding system for large scale Φ300 Si wafer. CIRP Ann-Manuf Techn 50(1):225–228
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