Mechanical effect of abrasives on silicon surface in chemo-mechanical grinding-Reference-Cited by-同舟云学术

Mechanical effect of abrasives on silicon surface in chemo-mechanical grinding

Published:2023-11 Issue: Volume:257 Page:108544
ISSN:0020-7403
Container-title:International Journal of Mechanical Sciences
language:en
Short-container-title:International Journal of Mechanical Sciences

Author:

Zhang Yu,Kang Renke,Ren Jiawei,Lang Hongye,Gao Shang

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Civil and Structural Engineering,Ocean Engineering,Aerospace Engineering,Applied Mathematics

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